Controller for Sub Micron Feedback Stage / FC-111
Dedicated controller for sub micron feedback stage (FS-X series) to control with sub micron resolution.
Highly safe and easy to operate with various error detection functions, general-purpose I / O, and teaching functions.
Highly safe and easy to operate with various error detection functions, general-purpose I / O, and teaching functions.
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Part Number
FC-111
| Catalog Code | W9308 |
|---|---|
| RoHS | Yes |
| CE | No |
| Guide | ▶Sample programs are available for download on our website. |
| In Position Range | +/- 100nm (+/- 300, +/- 700nm selectable) |
| Slow Down Sensor Input | N/A |
| Minimum Command Unit | 100nm |
| Max Travel Range Set Value | -13421.7728 ～ +13421.7727mm |
| Max Operating Speed Set Value | 100mm/sec |
| Number of Control Axes | 2 axes |
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