FS-PX Dedicated Controller for 10nm Ｆeedback Stage / FC-511
Dedicated controller for 10nm feedback stage (FS-PX series) to control with 10nm resolution.
Highly safe and easy to operate with various error detection functions, general-purpose I / O, and teaching functions.
Highly safe and easy to operate with various error detection functions, general-purpose I / O, and teaching functions.
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Part Number
FC-511
¥700,000
| Catalog Code | W9306 |
|---|---|
| RoHS | Yes |
| CE | No |
| Download Product's Datasheet | |
| Guide | ▶Sample programs are available for download on our website. |
| In Position Range | +/- 10nm (+/- 30, +/- 70nm selectable) |
| Slow Down Sensor Input | N/A |
| Minimum Command Unit | 10nm |
| Max Travel Range Set Value | -1342.17728～+1342.17727mm |
| Max Operating Speed Set Value | 50mm/sec |
| Number of Control Axes | 2 axes |
