FS-PX Dedicated Controller for 10nm Feedback Stage / FC-514
Dedicated controller for 10nm feedback stage (FS-PX series) to control with 10nm resolution.
Highly safe and easy to operate with various error detection functions, general-purpose I / O, and teaching functions.
Highly safe and easy to operate with various error detection functions, general-purpose I / O, and teaching functions.
Contact us
Part Number
FC-514
¥700,000
Catalog Code | W9306 |
---|---|
RoHS | Yes |
CE | No |
Download Product's Datasheet | |
Guide | ▶Sample programs are available for download on our website. |
In Position Range | +/- 10nm (+/- 30, +/- 70nm selectable) |
Slow Down Sensor Input | Applicable |
Minimum Command Unit | 10nm |
Max Travel Range Set Value | -1342.17728~+1342.17727mm |
Max Operating Speed Set Value | 50mm/sec |
Number of Control Axes | 2 axes |