FS-SPX Dedicated Controller for 5nm Ｆeedback Stage / FC-611
Dedicated controller for 5nm feedback stage (FS-SPX series) to control with 5nm resolution.
Highly safe and easy to operate with various error detection functions, general-purpose I / O, and teaching functions.
Highly safe and easy to operate with various error detection functions, general-purpose I / O, and teaching functions.
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Part Number
FC-611
¥750,000
| Catalog Code | W9304 |
|---|---|
| RoHS | Yes |
| CE | No |
| Download Product's Datasheet | |
| Guide | ▶Sample programs are available for download on our website. |
| In Position Range | +/- 5nm (+/- 15,+/- 35nm selectable) |
| Minimum Command Unit | 5nm |
| Max Travel Range Set Value | -671.088640～+671.088635mm |
| Max Operating Speed Set Value | 30mm/sec |
| Number of Control Axes | 2 axes |
