10nm Feedback Stage / FS-3150PX

FS-PX is feedback stage with 10nm resolution positioning.
In-house optical linear encoder are built-in at the center of stage to detect position.
Positioning to target position, positioning repeatability and holding the position with high resolution is achieved by feedback control using position information of encoder.
There are five types of the stages. It is ideal for collecting the data in a wide range or for performing precise positioning and movement of a sample on a single stage by the large travel range.