Xyθ Axis Set / HPS/HDS120-Xyθ-SET
These sets include all components neccesary to operate the motorized stages they include.
Yθ axis Set/Motorized stage system for minute positioning and angle adjustment such as for marking of semiconductor wafers.
Yθ axis Set/Motorized stage system for minute positioning and angle adjustment such as for marking of semiconductor wafers.
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Part Number
HPS/HDS120-Xyθ-SET
¥683,100
◦It can be controlled externally using Ethernet/RS232C/USB interface.Also, the number of axes is extendable by adding slave controllers (Part Number: HIT-SH).
XYθ axis Set
| Products Name | Part Number | Quantity |
| High Performance Motorized Stages | HPS120-60X-M5 | 2 |
| High Durability Automatic Rotation Stage | HDS-120YAW | 1 |
| Extensible Stage Controller (Master) | HIT-MV | 1 |
| Extensible Stage Controller (Slave) | HIT-SH | 3 |
| AC Adapter | ― | 1 |
| D15RP Cable | D15RP-CA-3 | 3 |
| Catalog Code | W9062 |
|---|---|
| RoHS | Yes |
| CE | No |
| Download Product's Datasheet | |
| Cable Length | 3m |
| Axes of Travel | Xyθ Axis |
| With Scale | None |
| Stage Size | φ120mm |
| Travel | ±6°(θ axis)60mm(XY axis) |
| Load Capacity | 58.8N(6.0kgf) |
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