XY Axis Piezo Assist Stage / TADC-652WS25-M6PA
XY-axis stage that allows fine adjustment of 20nm or less by adding a piezo assist mechanism to the manual stage. Ideal for manual stage units and systems that require high resolution position adjustment. Stage sizes 25x25, 40x40, 60x60mm, 65x65mm are available.
Contact us
Part Number
TADC-652WS25-M6PA
¥143,000
- A dedicated controller for the piezo assist stage easily perform fine adjustment without any setting. The fine adjustment of the dial type knob can be used without resistance even in combination with a micrometer head.
Catalog Code | W7157 |
---|---|
RoHS | Yes |
CE | Yes |
Download Product's Datasheet | |
CAD data | |
Guide |
|
Attention |
|
Stage Size | 65×65mm |
Piezo resolution | <20nm |
Micrometer Readable Resolution | 0.01mm |
Micrometer Position | Side |
Moment Stiffness / Pitch | 0.6″/N・cm |
Moment Stiffness / Roll | 0.6″/N・cm |
Guide Method | Extended Contact Ball Bearing Guide |
Travel Accuracy / Straightness | 3μm |
Running Parallelism | 20μm |
Lead of Actuator | 0.5mm |
Max. Moment Capacity / Pitch | 4.9N・m |
Max. Moment Capacity / Yaw | 4.9N・m |
Max. Moment Capacity / Roll | 4.9N・m |
Weight | 0.72kg |
Primary material | Aluminum |
Travel of Coarse Drive | ±12.5mm |
Load Capacity | 49N(5kgf) |
Travel of Fine Drive | >30µm |
Finish | Black anodized |
Parallelism | 50μm |