10nm Feedback Stage / NFS60-40PX

• Use a controller (SHRC-203) compatible with Feedback Stage (NFS series).

• When operating, use in an environment with minimal temperature fluctuation. (Recommended: 23±1℃)
• Use the product in an environment with as little vibration as possible. Or use it in an anti-vibration environment.
• Use in an environment free of oil mist. Otherwise, the glass scale may become contaminated and scale errors may occur.
• Contact our Sales if you intend to mount a workpiece larger than the size of the table surface.

*1 Resolution is automatically set by “AutoConfig” when SHRC controller is connected.
*2 Values when the multi-point error compensation function is enabled.
*3 Micro-range Bi-directional Repeatability is a test to measure repetitive positioning accuracy (ISO) in a micro range. Measurement step for 10 nm feedback stage (NFS-PX series): 50 nm