Wide Field of View High-NA Objective Lenses with silicon thickness compensation / PAL-10-SWIR-HRWF-Si0520

Wide field of view and high NA objective lenses compatible with large size (φ33mm) and large number of pixels camera. Operated at SWIR range (900-1700nm).

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Part Number
PAL-10-SWIR-HRWF-Si0520
¥2,000,000
  • The corresponding clear image over 900-1700nm can be obtained within the depth of field.
  • PAL-10-SWIR-HRWF-Si0520 and PAL-10-SWIR-HRWF-Si0775 are objective lenses for observing the underside of the silicon wafer. The aberration is corrected for silicon wafer thickness of 0.52 mm and 0.775 mm, respectively.
More Information
Catalog Code W3231
RoHS Yes
CE No
CAD data
Guide
  • Wide field of view and high NA compatible observation barrel (OUCI-SWIR-HRWF) available separately.
  • Flare might be problem when using PAL-1-SWIR-HRWF or PAL-2.5-SWIR-HRWF with coaxial illumination. It can be reduced by inserting polarizing filter in the observation barrel (OUCI-SWIR-HRWF) and attaching waveplate unit (WP-SWIR1(*X), WP-SWIR2(*X)) to the tip of objective lens.
Numerical aperture (NA) 0.61
Actual field of view φ3.3 mm image circle φ33mm
Item name M Plan Apo SWIR HRWF Si0520 10x
Working distance (WD) 10 mm calculated as air
Weight 0.72 kg
Focal length f 20 mm
Focal depth ±1.7 μm wavelength 1.3μm
Magnification 10x
Resolution 1.1 μm wavelength 1.3μm