XY Piezo Stages Aperture Type / SFS-120XY(WA)
Two Axis Nanometer resolution high stiffness flexure stages with central aperture.
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Part Number
SFS-120XY(WA)
◦High precision XY piezo stages offer high precision and high resolution positioning by utilizing full closed loop control with digital frequency based sensors.
◦50mm x 50mm aperture makes these stages ideal for microscopy applications
◦Using piezo element actuators, open loop travel between 90μm − 100μm is available, with minimum incremental motion as small as 1nm.
◦Closed loop travel is 80% of the open loop maximum and closed loop resolution is 10nm.
◦Recommended controller is the FINE-503(＊＊).
◦50mm x 50mm aperture makes these stages ideal for microscopy applications
◦Using piezo element actuators, open loop travel between 90μm − 100μm is available, with minimum incremental motion as small as 1nm.
◦Closed loop travel is 80% of the open loop maximum and closed loop resolution is 10nm.
◦Recommended controller is the FINE-503(＊＊).
| Catalog Code | W9055 |
|---|---|
| RoHS | No |
| CE | No |
| Download Product's Datasheet | |
| CAD data | |
| Attention | ▶The travel at closed loop control is reduced to around 20% less than at open loop control. |
| 3D_CAD | |
| Actuator | Piezo actuator |
| Axes of Travel | Rotation |
| Stage Size | 120×120mm |
| Linearity | － |
| Travel (at open-loop control) | 100μm±10% |
| Positional Repeatability | ＜0.1μm |
| Weight | 1.2kg |
| Perpendicularity (Horizontal Direction) | ＜1μm |
| Compatible Cable | FINE-CA-3: For piezo DS1-CA-3: For digital sensor |
| Load Capacity | 19.6N(2.0kgf) |
| Micro-displacement Sensor | Digital Sensor |
| Resolution (closed-loop) | 10nm |
| Theoretical Resolution (open-loop | 1nm |
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