Sigma Fine (Piezo) Stages (high stiffness type) / SFS-H60XYZ(CL)
Nanometer resolution high stiffness flexure stages.
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Part Number
SFS-H60XYZ(CL)
◦These compact piezo stages offer high precision and high resolution positioning by utilizing full closed loop control with digital frequency based sensors.
◦Using piezo element actuators, open loop travel between 90μm − 100μm is available, with minimum incremental motion as small as 1nm. Compared to the open-loop control, the maximum travel of closed-loop control will be less about 20%.
◦Closed loop travel is 80% of the open loop maximum and closed loop resolution is 10nm.
◦Recommended controllers are the FINE series controllers. Both digital and analog inputs are available.
◦Using piezo element actuators, open loop travel between 90μm − 100μm is available, with minimum incremental motion as small as 1nm. Compared to the open-loop control, the maximum travel of closed-loop control will be less about 20%.
◦Closed loop travel is 80% of the open loop maximum and closed loop resolution is 10nm.
◦Recommended controllers are the FINE series controllers. Both digital and analog inputs are available.
Catalog Code | W9054 |
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RoHS | No |
CE | No |
Download Product's Datasheet | |
CAD data | |
Attention | ▶The travel at closed loop control is reduced to around 20% less than at open loop control. |
3D_CAD | |
Actuator | Piezo actuator |
Axes of Travel | XYZ Axis |
Stage Size | 60×60mm |
Linearity | <0.3% |
Travel (at open-loop control) | 100μm±15% |
Positional Repeatability | <0.15μm |
Weight | 0.63kg |
Perpendicularity (Horizontal Direction) | 1μm |
Compatible Cable | FINE-CA-3: For piezo DS1-CA-3: For digital sensor |
Load Capacity | 9.8N(1.0kgf) |
Micro-displacement Sensor | Digital Sensor |
Resolution (closed-loop) | 10nm |
Theoretical Resolution (open-loop | 1nm |