Precision Motorized Stages with built in Glass-scale Encoder / HST(GS)-100X-0B

Linear scales consist of “scales” used as a ruler and a “detector” which obtains positional information from the scales.
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Only 1 left
Part Number
HST(GS)-100X-0B
¥570,000
◦Linear scales are used in indispensable processes in many fields, and mainly used in equipment for manufacturing electronic devices such as semiconductors, flat panel displays (FPD), and printed wiring boards, electronic component mounting machine, machine tools, and carrier machine.
More Information
Catalog Code W9090
RoHS Yes
CE Yes
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CAD data
Guide ▶Interpolated resolution of the glass scale is set to 0.05μm.
▶Contact our sales team about custom configurations.
Attention ▶When operating the HST(GS) series with closed loop control, in order to use it within the specifications listed in the catalog, the number of motor divisions of the controller is recommended to be set to 100 or higher (travel per pulse is 0.05μm or less).
MAX Speed 10mm/sec
Stage Material Steel
Sensor Part Number Micro photo sensor : GP1S092HCPIF(Sharp Corporation)
Stage Size 165×220mm
Backlash 1μm
Pitch 20″
Moment Stiffness / Pitch 0.01″/N・cm
Moment Stiffness / Yaw 0.01″/N・cm
Moment Stiffness / Roll 0.005″/N・cm
Yaw 20″
Limit Sensor Equipped (NORMAL CLOSE)
Lost Motion 0.5μm
Positioning Accuracy 4μm
Positioning Slide Crossed roller
Travel 100mm
Running Parallelism 10μm
Proximity Origin Sensor Equipped (NORMAL OPEN)
Positional Repeatability 0.5μm
Origin Sensor Equipped (NORMAL OPEN)
Weight 10.7kg
Feed Screw Ball screw diameter φ10mm, 2mm lead
Load Capacity 392N(40.0kgf)
Resolution (Full) 4μm/pulse
Resolution (Half) 2μm/pulse
Parallelism 70μm
Sensor / Output Logic When shaded: Output transistor OFF (no conduction):Limit Sensor
When shaded: Output transistor ON (conduction): Origin sensor,Proximity Origin Sensor
Sensor / Current Consumption 80mA or lower (20mA or lower per sensor)
Sensor / Control Output NPN open collector output DC30V or lower, 50mA or lower
Sensor / Power Voltage DC5~24V±10%
Motor / Motor Step Angle 0.72°
Motor / Motor Type 5-phase stepping motor 1.4A/phase (Oriental Motor Co., Ltd.)
Motor / Motor Part Number PKP544N18B(□42mm)
Type of Axis X Axis
Compatible Controller SHOT-302GS、SHOT-304GS、HIT-M・HIT-SH