Precision Motorized Stages with built in Glass-scale Encoder / HST(GS)-200X-0B
Linear scales consist of “scales” used as a ruler and a “detector” which obtains positional information from the scales.
In stock
Only 2 left
Part Number
HST(GS)-200X-0B
¥750,000
◦Linear scales are used in indispensable processes in many fields, and mainly used in equipment for manufacturing
electronic devices such as semiconductors, flat panel displays (FPD), and printed wiring boards, electronic component mounting machine, machine tools, and carrier machine.
Catalog Code | W9090 |
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RoHS | Yes |
CE | Yes |
Download Product's Datasheet | |
CAD data | |
Guide | ▶Interpolated resolution of the glass scale is set to 0.05μm. ▶Contact our sales team about custom configurations. |
Attention | ▶When operating the HST(GS) series with closed loop control, in order to use it within the specifications listed in the catalog, the number of motor divisions of the controller is recommended to be set to 100 or higher (travel per pulse is 0.05μm or less). |
MAX Speed | 20mm/sec |
Stage Material | Steel |
Sensor Part Number | Micro photo sensor : GP1S092HCPIF(Sharp Corporation) |
Stage Size | 165×420mm |
Backlash | 1μm |
Pitch | 20″ |
Moment Stiffness / Pitch | 0.01″/N・cm |
Moment Stiffness / Yaw | 0.01″/N・cm |
Moment Stiffness / Roll | 0.005″/N・cm |
Yaw | 20″ |
Limit Sensor | Equipped (NORMAL CLOSE) |
Lost Motion | 0.5μm |
Positioning Accuracy | 5μm |
Positioning Slide | Crossed roller |
Travel | 200mm |
Running Parallelism | 20μm |
Proximity Origin Sensor | Equipped (NORMAL OPEN) |
Positional Repeatability | 0.8μm |
Origin Sensor | Equipped (NORMAL OPEN) |
Weight | 18.9kg |
Feed Screw | Ball screw diameter φ10mm, 2mm lead |
Load Capacity | 392N(40.0kgf) |
Resolution (Full) | 4μm/pulse |
Resolution (Half) | 2μm/pulse |
Parallelism | 100μm |
Sensor / Output Logic | When shaded: Output transistor OFF (no conduction):Limit Sensor When shaded: Output transistor ON (conduction): Origin sensor,Proximity Origin Sensor |
Sensor / Current Consumption | 80mA or lower (20mA or lower per sensor) |
Sensor / Control Output | NPN open collector output DC30V or lower, 50mA or lower |
Sensor / Power Voltage | DC5~24V±10% |
Motor / Motor Step Angle | 0.72° |
Motor / Motor Type | 5-phase stepping motor 1.4A/phase (Oriental Motor Co., Ltd.) |
Motor / Motor Part Number | PKP544N18B(□42mm) |
Type of Axis | X Axis |
Compatible Controller | SHOT-302GS、SHOT-304GS、HIT-M・HIT-SH |