XY Axis Piezo Assist Stage
X Axis Piezo Assist Stage Products List/ XY Axis Piezo Assist Stage Products List/ Z Axis Piezo Assist Stage (Vertical Mounting) Products List/ Z Axis Piezo Assist Stage (with Z Vertical Mounting) Products List
XY-axis stage that allows fine adjustment of 20nm or less by adding a piezo assist mechanism to the manual stage. Ideal for manual stage units and systems that require high resolution position adjustment.
A dedicated controller for the piezo assist stage easily perform fine adjustment without any setting. The fine adjustment of the dial type knob can be used without resistance even in combination with a micrometer head.
Piezo Assist Stages TADC-PA Series Introduction
TADC-2PA (XY Axis) Common Specifications
| Products Type | TADC-252W | TADC-402W | TADC-602W | TADC-652W |
|---|---|---|---|---|
| Stage Size | 25×25mm | 40×40mm | 60×60mm | 65×65mm |
| Travel of Coarse Drive | ±3mm | ±6.5mm | ±6.5mm | ±12.5mm |
| Travel of Fine Drive | >25µm | >30µm | >30µm | >30µm |
| Travel/ rotation | 0.5mm | |||
| Micrometer Readable Resolution | 0.01mm | |||
| Piezo resolution | <20nm | |||
| Load Capacity | 39.2N（4.0kgf） | 49N（5.0kgf） | 49N（5.0kgf） | 49N（5.0kgf） |
| Travel Accuracy/ Straightness | 3μm | 3μm | 3μm | 3μm |
| Max. Moment Capacity/ Pitch | 1.9N・m | 2.5N・m | 4.9N・m | 4.9N・m |
| Max. Moment Capacity/ Roll | 1.9N・m | 2.5N・m | 4.9N・m | 4.9N・m |
| Max. Moment Capacity/ Yaw | 1.9N・m | 2.5N・m | 4.9N・m | 4.9N・m |
| Moment Stiffness/ Pitch | 4.5″/N・cm | 1.22″/N・cm | 0.6″/N・cm | 0.6″/N・cm |
| Moment Stiffness/ Roll | 4.5″/N・cm | 1.22″/N・cm | 0.6″/N・cm | 0.6″/N・cm |
| Parallelism | 60μm | 50μm | 50μm | 50μm |
| Running Parallelism | 20μm | 20μm | 20μm | 20μm |
| 直交度 | 10μm | 10μm | 10μm | 10μm |
| Weight | 0.14kg | 0.3kg | 0.5kg | 0.72kg |
| Giude Method | Extended Contact Ball Bearing Guide | |||
| Primary Material | Aluminium | |||
| Finish | Black anodized | |||
TADC-2PA series Specifications
| Part Number | Stage Size | Micrometer Position | Mounting Thread |
|---|---|---|---|
| TADC-252WSPA | 25×25mm | Side | METRIC |
| TADC-252WSRPA | 25×25mm | Side (Opposite Model) | METRIC |
| TADC-402WSPA | 40×40mm | Side | METRIC |
| TADC-402WSRPA | 40×40mm | Side (Opposite Model) | METRIC |
| TADC-602WSPA | 60×60mm | Side | METRIC |
| TADC-602WSRPA | 60×60mm | Side (Opposite Model) | METRIC |
| TADC-652WS25-M6PA | 65×65mm | Side | METRIC |
| TADC-652WSR25-M6PA | 65×65mm | Side (Opposite Model) | METRIC |
| TADC-652WS25UUPA | 65×65mm | Side | INCH |
| TADC-652WSR25UUPA | 65×65mm | Side (Opposite Model) | INCH |
Controller Dedicated for Piezo Assist Stage
Dedicated controller that drives the piezo assist stage series. Lineup includes 1-axis type and 3-axis type.| Product Name | 1 Axis Controller for Piezo Assist Stage | 3 Axis Controller for Piezo Assist Stage | AC Adapter |
|---|---|---|---|
| Part Number | PASC-101 | PASC-103 | AC-ADP-0620-62368 |
| Product Image |  |
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