Precision Motorized Stages with Built-in Compact Scale / OSMS(CS)26-100(X)-M6

Precision motorized stages with built-in compact optical scales make highly accurate and reliable full closed loop system using Sigma-Koki controllers (SHOT-302GS/304GS, HIT-M・HIT-S).
In stock
Part Number
OSMS(CS)26-100(X)-M6
¥208,000
◦U-shaped guide rail offers light weight, and minimized deflection to achieve high stiffness.
◦Includes a compact scale built in while keeping the installation space the same as that of the equivalent open loop OSMS series.
More Information
Catalog Code W9070
RoHS Yes
CE Yes
Download Product's Datasheet
CAD data
Guide ▶Contact our Sales Division for replacement of motors or for stabilizing (drop-preventing) mechanism. WEB Reference Catalog Code/W9500 (Motorized Stage System Question Sheet)
▶Grease change is optionally available.(WEB Reference Catalog Code/W9006)
▶Contact our Sales Division to use the stage as an XY axis or a Z axis stage.
3D_CAD



Specifications
Mechanical Specifications
Travel100mm
Stage Size120×120mm
Feed ScrewBall screw diameter φ8mm 2mm lead
Positioning SlideOuter rail structure
Stage MaterialAluminium
FinishBlack anodized
Weight3.4kg
Accuracy Specificati
Resolution (Full)4μm/pulse
Resolution (Half)2μm/pulse
MAX Speed40mm/sec
Positioning Accuracy10μm
Positional Repeatability2μm
Load Capacity117N(12.0kgf)
Moment Stiffness / Pitch0.23″/N・cm
Moment Stiffness / Yaw0.12″/N・cm
Moment Stiffness / Roll0.2″/N・cm
Lost Motion3μm
Backlash3μm
Parallelism50μm
Running Parallelism10μm
Pitch25″
Yaw20″
Sensor
Sensor Part NumberMicro photo sensor : GP1S092HCPIF(Sharp Corporation)
Limit SensorEquipped (NORMAL CLOSE)
Origin SensorEquipped (NORMAL OPEN)
Proximity Origin SensorEquipped (NORMAL OPEN)
Scale head
Resolution0.5μm
Motor
Motor / Motor Type5-phase stepping motor 0.75A/phase (Oriental Motor Co. Ltd.)
Motor / Motor Part NumberPK525HPB-C4(□28mm)
Motor / Motor Step Angle0.72°
Sensor
Sensor / Power VoltageDC5-24V±10%
Sensor / Current Consumption80mA or lower (20mA or lower per sensor)
Sensor / Control OutputNPN open collector output DC30V or lower 50mA or lower
Sensor / Output LogicWhen shaded: Output transistor OFF (no conduction) : Limit Sensor
When shaded: Output transistor ON (conduction): Origin sensor Proximity Origin Sensor
Scale head
Power Voltage / Current ConsumptionDC5V±5% / 50mA
Cable
Driver CableD15D15A-CA
Scale CableGSEF-CA-3
Control System
Compatible Driver
Compatible ControllerSHOT-302GS、SHOT-304GS、HIT-M・HIT-S