Precision Motorized Stages with Built-in Compact Scale / OSMS(CS)33-300(X)-M6
Precision motorized stages with built-in compact optical scales make highly accurate and reliable full closed loop system using Sigma-Koki controllers (SHOT-302GS/304GS, HIT-M・HIT-S).
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Part Number
OSMS(CS)33-300(X)-M6
¥398,000
◦U-shaped guide rail offers light weight, and minimized deflection to achieve high stiffness.
◦Includes a compact scale built in while keeping the installation space the same as that of the equivalent open loop OSMS series.
◦Includes a compact scale built in while keeping the installation space the same as that of the equivalent open loop OSMS series.
Catalog Code | W9074 |
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RoHS | Yes |
CE | Yes |
Download Product's Datasheet | |
CAD data | |
Guide | ▶Contact our Sales Division for replacement of motors or for stabilizing (drop-preventing) mechanism. WEB Reference Catalog Code/W9500 (Motorized Stage System Question Sheet) ▶Grease change is optionally available.(WEB Reference Catalog Code/W9006) ▶Contact our Sales Division to use the stage as an XY axis or a Z axis stage. |
3D_CAD | |
MAX Speed | 100mm/sec |
Scale head | 0.5μm |
Stage Material | Aluminium |
Sensor Part Number | Micro photo sensor : GP1S092HCPIF(Sharp Corporation) |
Stage Size | 120×120mm |
Backlash | 3μm |
Pitch | 25″ |
Moment Stiffness / Pitch | 0.12″/N・cm |
Moment Stiffness / Yaw | 0.08″/N・cm |
Moment Stiffness / Roll | 0.1″/N・cm |
Yaw | 20″ |
Limit Sensor | Equipped (NORMAL CLOSE) |
Lost Motion | 5μm |
Positioning Accuracy | 25μm |
Positioning Slide | Outer rail structure |
Travel | 300mm |
Proximity Origin Sensor | Equipped (NORMAL OPEN) |
Positional Repeatability | 5μm |
Origin Sensor | Equipped (NORMAL CLOSE) |
Weight | 7.4kg |
Running Parallelism | 10μm |
Feed Screw | Ball screw diameter φ10mm, 10mm lead |
Load Capacity | 196N(20.0kgf) |
Finish | Black anodized |
Resolution (Full) | 20μm/pulse |
Resolution (Half) | 10μm/pulse |
Parallelism | 50μm |
Scale Cable | GSEF-CA-3 |
Sensor / Output Logic | When shaded: Output transistor OFF (no conduction) : Limit Sensor When shaded: Output transistor ON (conduction): Origin sensor, Proximity Origin Sensor |
Sensor / Current Consumption | 80mA or lower (20mA or lower per sensor) |
Sensor / Control Output | NPN open collector output 50mA |
Sensor / Power Voltage | DC5~24V±10% |
Driver Cable | D15D15A-CA |
Motor / Motor Step Angle | 0.72° |
Motor / Motor Type | 5-phase stepping motor 0.75A/phase (Tamagawa Seiki Co., Ltd.) |
Motor / Motor Part Number | TS3667N43E967(□42mm) |
Compatible Controller | SHOT-302GS、SHOT-304GS、HIT-M・HIT-S |
Compatible Driver | - |
Power Voltage / Current Consumption | DC5V±5% / 100mA |