Discontinued

Precision Motorized Stages with built in Glass-scale Encoder / TSDM(GS)60-10ZF

Full closed loop control system that controls a motorized stage with built-in high resolution compact linear encoder using a special controller.

Contact us

Part Number
TSDM(GS)60-10ZF
◦Linear encoder signal feedback and micro-step drive can minimize lead error, which is inherent to feed screw mechanism.
◦Small glass scale of linear expansion coefficient enabled a highly reliable positioning system stable against fluctuations in ambient environment.
◦Ideal for use in positioning that requires precision in submicron units, and prolonged driving that is affected by reproducibility by temperature drift.
More Information
Catalog Code W9038
RoHS Yes
CE No
CAD data
Specifications
MAX Speed2mm/sec
Axes of TravelZ Axis
Stage MaterialSteel
Sensor Part NumberPM-L24(SUNX Co., Ltd.)
Stage Size60×60mm
Backlash5μm
Pitch15″
Moment Stiffness / Pitch2″/N・cm
Moment Stiffness / Yaw2″/N・cm
Moment Stiffness / Roll
Yaw
Limit SensorEquipped (NORMAL CLOSE)
Lost Motion0.5μm
Positioning Accuracy2μm
Positioning SlideExtended Contact Ball Guide
Travel10mm
Perpendicularity of Motion8μm
Running Parallelism
Proximity Origin SensorNone
Positional Repeatability0.5μm
Origin SensorNone
Weight0.7kg
Feed ScrewPrecision ground screw φ5mm, 0.5mm lead
Load Capacity19.6N(2.0kgf)
Resolution (Full)1μm/pulse
Resolution (Half)0.5μm/pulse
Parallelism50μm
Motor / Motor Step Angle0.72°
Motor / Motor Type5-phase stepping motor 0.35A/phase (Oriental Motor Co. Ltd.)
Motor / Motor Part NumberPK513PB-C9(□20mm)
Compatible ControllerSHOT-302GS、SHOT-304GS、HIT-M・HIT-S