Vacuum Compatible Motorized Stages / VSGSP20-35(X)
Motorized SGSP stages modified for use in high vacuum.
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Part Number
VSGSP20-35(X)
¥750,000
◦Linear stages have available travel between 35 − 200mm and has a similar footprint to the SGSP series.
| Catalog Code | W9082 |
|---|---|
| RoHS | Yes |
| CE | Yes |
| Download Product's Datasheet | |
| CAD data | |
| Guide | ▶Includes 1m teflon coated cables to connect the vacuum motor and vacuum limit switches to the chamber feedthrough connector. |
| MAX Speed | 10mm/sec |
| Positional Repeatability | 5μm |
| Axes of Travel | X Axis |
| Stage Material | Aluminium |
| Censer type | GN-PT5M3B-1 (Metrol Co., Ltd.) |
| Sensor Part Number | GN-PT5M3B-1 (Metrol Co., Ltd.) |
| Stage Size | 60×60mm |
| Resolution (Half) | 1μm/pulse |
| Resolution (Full) | 2μm/pulse |
| Limit Sensor | Vacuum touch sensor (NORMAL CLOSE) |
| Lost Motion | 3μm |
| Positioning Slide | Crossed roller |
| Travel | 35mm |
| Proximity Origin Sensor | None |
| Origin Sensor | None |
| Minimum Incremental Motion (reference) | 0.2μm |
| Weight | 1.0kg |
| Feed Screw | Precision ground screw φ4mm, 0.5mm lead |
| Load Capacity | 29.4N(3.0kgf) |
| Finish | None |
| Resolution (Full) | 0.5μm/pulse |
| Resolution (Half) | 1μm/pulse |
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