Vacuum Compatible Motorized Stages / VSGSP26-200(X)
Motorized SGSP stages modified for use in high vacuum.
In stock
Only 2 left
Part Number
VSGSP26-200(X)
¥800,000
◦Linear stages have available travel between 35 − 200mm and has a similar footprint to the SGSP series.
Catalog Code | W9082 |
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RoHS | Yes |
CE | Yes |
Download Product's Datasheet | |
CAD data | |
Guide | ▶Includes 1m teflon coated cables to connect the vacuum motor and vacuum limit switches to the chamber feedthrough connector. |
MAX Speed | 20mm/sec |
Positional Repeatability | 10μm |
Axes of Travel | X Axis |
Stage Material | Aluminium |
Censer type | GN-PT5M3B-1 (Metrol Co., Ltd.) |
Sensor Part Number | GN-PT5M3B-1 (Metrol Co., Ltd.) |
Stage Size | 80×80mm |
Resolution (Half) | 1μm/pulse |
Resolution (Full) | 4μm/pulse |
Limit Sensor | Vacuum touch sensor (NORMAL CLOSE) |
Lost Motion | 10μm |
Positioning Slide | Crossed roller |
Travel | 200mm |
Proximity Origin Sensor | None |
Origin Sensor | None |
Minimum Incremental Motion (reference) | 0.2μm |
Weight | 2.5kg |
Feed Screw | Precision ground screw φ4mm, 0.5mm lead |
Load Capacity | 29.4N(3.0kgf) |
Finish | None |
Resolution (Full) | 0.5μm/pulse |
Resolution (Half) | 2μm/pulse |