Vacuum Compatible Miniature Motorized Stages / VTAMM60S-20Z

CE-compliant compact motorized stages for use in high vacuum.
It is a motorized stage suitable for experiments in a vacuum environment and for use in a vacuum chamber.
Compact, slim body for minimal footprint. VTAMM can also be installed in small vacuum equipment.

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Part Number
More Information
Catalog Code W9101
RoHS Yes
CE Yes
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▶Includes 1m teflon coated cables to connect the vacuum motor and vacuum limit switches to the chamber feedthrough connector.
▶Various types of bases and holders which can be used in vacuum environments are also available.


Stage Size60×60mm
Feed ScrewPrecision ground screw φ4mm , 0.5mm lead
Positioning SlideCrossed roller
Stage MaterialAluminium
Resolution (Half)1μm/pulse
Resolution (Full)0.5μm/pulse
MAX Speed
Positional Repeatability6μm
Load Capacity14.7N(1.5kgf)
Lost Motion5μm
Censer typeGN-PT5M3B-1 (Metrol Co. Ltd.)
Limit SensorVacuum touch sensor (NORMAL CLOSE)
Origin SensorNone
Proximity Origin SensorNone